TMAH yo mu rwego rw'inganda/ikoranabuhanga 25% Tetramethylammonium Hydroxide cas 75-59-2
TMAH 25% Tetramethylammonium Hydroxide cas 75-59-2
Ibisobanuro by'ibicuruzwa:
Izina ry'igicuruzwa: TMAH 25%; Tetramethylammonium Hydroxide
Nimero ya CAS: 75-59-2
Formula ya Molecular: C4H13NO
Ishusho: amazi adafite ibara
Isanzwe ari kristu idafite ibara (irimo amazi atatu cyangwa atanu ya kristu), yoroshye kwinjiza ubushuhe, ifite impumuro runaka ya amoniya n'ubushyuhe bukomeye; ikwinjiza dioxyde de carbone mu kirere, igakora karubone, alkali y'umwimerere, ifite ubushyuhe bukomeye. Iki gicuruzwa gifite ubwoko bubiri bw'ibipimo: umuti w'amazi n'umuti wa methanol.
Tetramethylammonium hydroxide (TMAH cyangwa TMAOH) ni umunyu wa ammonium wa quaternary ufite formula ya molekile [(CH3)4N]+[OH]-, kandi ni wo muto cyane mu bwoko bw'ibinyabutabire bya ammonium bya quaternary. Imwe mu mikoreshereze yayo mu nganda ni ugushushanya silikoni. Ikoreshwa kandi nk'ikintu cy'ibanze mu guteza imbere aside photoresist muri fotolithography. Kubera ko ari catalyst yo kohereza ibintu mu buryo bw'icyiciro, igira akamaro kanini mu gukuraho photoresist. Ikoreshwa kandi nk'ikintu kiyitera imbaraga mu gukora ferrofluid, kugira ngo hirindwe ko iterana.
1) Mu rwego rwo gusesengura, tetramethylammonium Hydroxide ishobora gukoreshwa nk'igikoresho cya polarographic.
2) Mu bijyanye no gusukura ibicuruzwa, byakoreshejwe nk'ibintu bidafite ivu bya alkali mu gusya ibintu bimwe na bimwe by'icyuma.
3) mu nganda z'ikoranabuhanga, cyane cyane nk'umutezi wa resister mwiza, silicon wafer wet etchant n'umuti usukuye cyane wo gukoresha CMP.
4) mu gukora imiyoboro ya elegitoroniki, ibyuma bitanga urumuri, ibyuma bipima urumuri, ibikoresho by'ikoranabuhanga, n'ibindi bikoresho byinshi by'ikoranabuhanga.
| Amakuru yo Kohereza | Ibikoresho |
| Ingoma isukuye ya litiro 200 | |
| Andi makontena aboneka iyo ubisabye. | |
| Ishyirwa mu byiciro ry'ubwikorezi | |
| Izina ry'ubwikorezi rikwiye: tetramethylammonium hydroxide | |
| Icyiciro cy'ibyago: 8 | |
| Inomero iranga: UN1835, PGII |
| Umutekano n'Imicungire | Kubindi bisobanuro by'umutekano n'uburyo bwo kuwukoresha, reba |
| Urupapuro rw'amakuru y'umutekano w'ibikoresho ruboneka iyo ubisabye. |
| Ikintu | Urutonde |
| Isura | Amazi atagira ibara |
| Isuzuma | 25.00±0.50% |
| Hazen | ≤ 50# |
| (CO32-) | ≤ 40ppm |
| (Cl) | ≤ 0.1ppm |
| (CH3OH) | ≤ 40ppm |
| (Ibyo) | ≤ 5ppb |
| (Ibyo) | ≤ 10ppb |
| (Mg) | ≤ 5ppb |
| (Al) | ≤ 10ppb |
| (K) | ≤ 10ppb |
| (Ibyo) | ≤ 10ppb |
| (Cr) | ≤ 5ppb |
| (Mn) | ≤ 5ppb |
| (Fe) | ≤ 5ppb |
| (Ko) | ≤ 5ppb |
| (Muri) | ≤ 5ppb |
| (Hamwe na) | ≤ 5ppb |
| (Zn) | ≤ 5ppb |
| (Kuri) | ≤ 5ppb |
| (Kuri) | ≤ 5ppb |
| (CD) | ≤ 5ppb |
| (Pb) | ≤ 5ppb |
| agace gato (≥0.5μm) | ≤100ea/ml |
200kg cyangwa 25kg/ingoma
a, Bibikwa ahantu hakonje, humutse kandi hahumeka umwuka
b, Kure y'umuriro n'ubushyuhe
c, Fata witonze kandi ntuvunike
