Ibanga lezimboni/elekthronikhi i-TMAH 25% Tetramethylammonium Hydroxide cas 75-59-2

Incazelo emfushane:

Igama Lekhemikhali: I-Tetramethylammonium Hydroxide (TMAH)

Uhlobo: 25% TMAH (isisombululo); 99% TMAH (impuphu)

I-CAS 75-59-2

Sithumelele i-imeyili

Imininingwane Yomkhiqizo

Amathegi Omkhiqizo

Incazelo Yomkhiqizo

I-TMAH 25% Tetramethylammonium Hydroxide cas 75-59-2

Imininingwane yomkhiqizo:

Igama Lomkhiqizo: TMAH 25%; Tetramethylammonium Hydroxide

Inombolo ye-CAS: 75-59-2

Ifomula Yamamolekyuli: C4H13NO

Ukubukeka: uketshezi olungenambala

Yasekuqaleni njengekristalu engenambala (equkethe amanzi ekristalu amathathu/amahlanu), kulula ukuyimunca umswakama, inephunga elithile le-ammonia kanye nesisekelo esinamandla; imunca i-carbon dioxide emoyeni, yakha i-carbonate, i-alkali ephilayo, futhi inokugqwala okunamandla. Umkhiqizo unezinhlobo ezimbili zezincazelo: isisombululo samanzi kanye nesisombululo se-methanol.

Izici

I-Tetramethylammonium hydroxide (TMAH noma i-TMAOH) iyi-quaternary ammonium salt enefomula yama-molecule [(CH3)4N]+[OH]-, futhi iyilungu elilula kakhulu lesigaba sama-organic quaternary ammonium compounds. Enye yezindlela zayo zokusetshenziswa kwezimboni ukuqopha i-silicon nge-anisotropic. Iphinde isetshenziswe njenge-solvent eyisisekelo ekuthuthukisweni kwe-acidic photoresist enqubweni ye-photolithography. Njengoba iyi-phase transfer catalyst, isebenza kahle kakhulu ekususeni i-photoresist. Iphinde isetshenziswe njenge-surfactant ekwakhiweni kwe-ferrofluid, ukuvimbela ukuhlangana.

Isicelo

1) Engxenyeni yokuhlaziya, i-tetramethylammonium Hydroxide ingasetshenziswa njenge-reagent ye-polarographic.

2) Ngokuphathelene nokuhlanzwa komkhiqizo, wawusetshenziswa njenge-alkali engenamlotha ukuze uchithe insimbi ethile.

3) embonini ye-elekthronikhi, ikakhulukazi njengomthuthukisi we-resister omuhle, i-silicon wafer etchant emanzi kanye nesisombululo esihlanzekile kakhulu senqubo ye-CMP.

4) ekwenziweni kwamasekethe ahlanganisiwe, izibonisi zekristalu eliwuketshezi, amabhodi wesekethe aphrintiwe, ama-capacitor, ama-sensor, nezinye izingxenye eziningi ze-elekthronikhi.

Ulwazi lokuthumela

Ulwazi Lokuthumela	Iziqukathi
	Isigubhu esihlanzekile esingu-200L
	Ezinye izitsha ziyatholakala uma ziceliwe.
	Ukuhlukaniswa Kokuthunyelwa
	Igama lokuthumela elifanele: i-tetramethylammonium hydroxide
	Ukuhlukaniswa kwezingozi: 8
	Inombolo kamazisi: UN1835, PGII

Ukuphepha Nokuphatha	Ukuze uthole ulwazi oluthile lokuphepha nokuphatha sicela ubheke ku-
	Ishidi Ledatha Lokuphepha Kwezinto Ezibonakalayo elitholakala uma licelwa.

Imininingwane

Into	Inkomba
Ukubukeka	Uketshezi olungenambala
Ukuhlolwa	25.00±0.50%
UHazen	≤ 50#
(CO32-)	≤ 40ppm
(Cl)	≤ 0.1ppm
(CH3OH)	≤ 40ppm
(Lokho)	≤ 5ppb
(Lokho)	≤ 10ppb
(Mg)	≤ 5ppb
(Al)	≤ 10ppb
(K)	≤ 10ppb
(Lokho)	≤ 10ppb
(Cr)	≤ 5ppb
(Mn)	≤ 5ppb
(Fe)	≤ 5ppb
(I-Co)	≤ 5ppb
(Ngaphakathi)	≤ 5ppb
(Nge)	≤ 5ppb
(Zn)	≤ 5ppb
(Okwa)	≤ 5ppb
(Ngesikhathi)	≤ 5ppb
(I-Cd)	≤ 5ppb
(Pb)	≤ 5ppb
inhlayiya (≥0.5μm)	≤100ea/ml