TMAH ā-ahumahi/hikohiko 25% Tetramethylammonium Hydroxide cas 75-59-2
TMAH 25% Tetramethylammonium Hydroxide cas 75-59-2
Ngā taipitopito hua:
Ingoa Hua: TMAH 25%; Tetramethylammonium Hydroxide
Nama CAS: 75-59-2
Tātai ngota: C4H13NO
Āhua: wai kore tae
He tioata kore tae tōna taketake (e toru/rima ngā wai tioata kei roto), he ngāwari ki te mimiti i te makuku, he kakara haukini me te kaha o te taketake; he mimiti i te hauhā waro i te hau, ka hanga he warowaihā, he kawakore waro, he kaha te waikura. E rua ngā momo whakaritenga o te hua: he otinga wai me te otinga methanol.
Ko te Tetramethylammonium hydroxide (TMAH, TMAOH rānei) he tote ammonium quaternary me te tātai ngota [(CH3)4N]+[OH]-, ā, koia te mema māmā rawa o te akomanga o ngā matū ammonium quaternary waro. Ko tētahi o ōna whakamahinga ahumahi ko te whakairo anisotropic o te silicon. Ka whakamahia hoki hei whakarewa taketake i roto i te whakawhanaketanga o te photoresist waikawa i roto i te tukanga photolithography. Nā te mea he whakakorikori whakawhiti āhua, he tino whai hua ki te tango i te photoresist. Ka whakamahia hoki hei surfactant i roto i te hanganga o te ferrofluid, hei ārai i te kohikohinga.
1) I roto i te āhuatanga tātari, ka taea te whakamahi i te tetramethylammonium Hydroxide hei matū tauira polarographic.
2) Mō te purenga o te hua, i whakamahia hei kawakore kore pungarehu hei whakapūpū i tētahi huānga konganuku.
3) i roto i te umanga hiko, inā koa hei kaiwhakawhanake ātete pai, hei kaiwhakairo maku i te anga silicon me te otinga tino ma mo te tukanga CMP.
4) i roto i te hanga i ngā ara iahiko whakauru, ngā whakaaturanga karaihe wai, ngā papa ara iahiko tā, ngā pūnga iahiko, ngā pūoko, me te maha atu o ngā wāhanga hiko.
| Ngā Mōhiohio Tukunga | Ngā ipu |
| Pahu ma 200L | |
| Kei te wātea ētahi atu ipu mēnā ka tonoa. | |
| Whakarōpūtanga Tukunga | |
| Ingoa tuku tika: tetramethylammonium hydroxide | |
| Whakarōpūtanga mōrearea: 8 | |
| Tau tautuhi: UN1835, PGII |
| Haumaru me te Whakahaere | Mō ngā mōhiohio motuhake mō te haumaru me te whakahaere, tirohia te |
| Pepa Raraunga Haumaru Rauemi e wātea ana ina tonoa mai. |
| Taonga | Rārangi |
| Āhua | Wai kore tae |
| Whakamātautau | 25.00±0.50% |
| Hātene | ≤ 50# |
| (CO32-) | ≤ 40ppm |
| (Cl) | ≤ 0.1ppm |
| (CH3OH) | ≤ 40ppm |
| (Tērā) | ≤ 5ppb |
| (Tērā) | ≤ 10ppb |
| (Mg) | ≤ 5ppb |
| (Al) | ≤ 10ppb |
| (K) | ≤ 10ppb |
| (Tērā) | ≤ 10ppb |
| (Kr) | ≤ 5ppb |
| (Mn) | ≤ 5ppb |
| (Fe) | ≤ 5ppb |
| (Ko) | ≤ 5ppb |
| (I roto) | ≤ 5ppb |
| (Me) | ≤ 5ppb |
| (Zn) | ≤ 5ppb |
| (Mo) | ≤ 5ppb |
| (I) | ≤ 5ppb |
| (Kōpae) | ≤ 5ppb |
| (Pb) | ≤ 5ppb |
| matūriki (≥0.5μm) | ≤100 ia/ml |
200kg, 25kg rānei/pahu
a, Penapena ki te wāhi hauhautanga, maroke me te wāhi hauhautanga
b, Kia matara atu i te ahi me te wera
c, Kia tupato te whakahaere, kaua e whati
