TMAH vasega Alamanuia/Eletoni 25% Tetramethylammonium Hydroxide cas 75-59-2
TMAH 25% Tetramethylammonium Hydroxide cas 75-59-2
Fa'amatalaga o oloa:
Igoa o le Oloa: TMAH 25%; Tetramethylammonium Hydroxide
Numera o le CAS: 75-59-2
Fa'asologa Molekula: C4H13NO
Foliga vaaia: vai e leai se lanu
O lona amataga e pei o se tioata e leai se lanu (o loʻo i ai vai tioata e tolu/lima), e faigofie ona mitiia le susu, faʻatasi ai ma se manogi amonia ma se malosi faʻavae; e mitiia le kaponi taiokesaita i le ea, ma fausia ai le carbonate, alkali faʻaola, ma le malosi o le 'ele. E lua ituaiga faʻamatalaga o le oloa: vai faʻafefiloi ma le methanol.
O le Tetramethylammonium hydroxide (TMAH po'o le TMAOH) o se masima ammonium quaternary ma le fua fa'atatau molecular [(CH3)4N]+[OH]-, ma o le sui aupito faigofie lea o le vasega o organic quaternary ammonium compounds. O se tasi o ona fa'aoga fa'apisinisi o le fa'aaogaina lea o le anisotropic etching o le silicon. E fa'aaogaina fo'i o se solvent autu i le atina'eina o le acidic photoresist i le faiga o le photolithography. Talu ai o se phase transfer catalyst, e matua aoga lava i le aveeseina o le photoresist. E fa'aaogaina fo'i o se surfactant i le fa'aputuga o le ferrofluid, e puipuia ai le agglomeration.
1) I le itu o le auʻiliʻiliga, e mafai ona faʻaaogaina le tetramethylammonium Hydroxide o se reagent polarographic.
2) I le tulaga o le fa'amamāina o oloa, sa fa'aaogaina o se alkali e leai se lefulefu e fa'amamā ai nisi o elemene u'amea.
3) i le alamanuia eletise, aemaise lava i le avea ai ma se atina'e o le positive resister, silicon wafer wet etchant ma se fofo mama tele mo le fa'agasologa CMP.
4) i le gaosiga o matagaluega tuʻufaʻatasi, faʻaaliga tioata vai, laupapa matagaluega lolomi, capacitors, sensors, ma le tele o isi vaega eletise.
| Fa'amatalaga o Felauaiga | Koneteina |
| 200L le fagu mama | |
| O isi koneteina e maua pe a talosagaina. | |
| Fa'avasegaga o Felauaiga | |
| Igoa talafeagai o le felauaiga: tetramethylammonium hydroxide | |
| Fa'avasegaga o lamatiaga: 8 | |
| Numera fa'ailoa: UN1835, PGII |
| Saogalemu ma le Taulimaina | Mo fa'amatalaga patino e uiga i le saogalemu ma le taulimaina, fa'amolemole taga'i i le |
| Pepa Fa'amatalaga Saogalemu o Meafaitino lea e maua pe a talosagaina. |
| Mea | Fa'asino Upu |
| Foliga vaaia | Vai e leai se lanu |
| Su'ega | 25.00±0.50% |
| Hazen | ≤ 50# |
| (CO32-) | ≤ 40ppm |
| (Cl) | ≤ 0.1ppm |
| (CH3OH) | ≤ 40ppm |
| (Lena) | ≤ 5ppb |
| (Lena) | ≤ 10ppb |
| (Mg) | ≤ 5ppb |
| (Al) | ≤ 10ppb |
| (K) | ≤ 10ppb |
| (Lena) | ≤ 10ppb |
| (Cr) | ≤ 5ppb |
| (Mn) | ≤ 5ppb |
| (Fe) | ≤ 5ppb |
| (Kamupani) | ≤ 5ppb |
| (I totonu) | ≤ 5ppb |
| (Faatasi ai ma) | ≤ 5ppb |
| (Zn) | ≤ 5ppb |
| (Mo) | ≤ 5ppb |
| (I) | ≤ 5ppb |
| (Cd) | ≤ 5ppb |
| (Pb) | ≤ 5ppb |
| fasi vaega (≥0.5μm) | ≤100ea/ml |
200kg po'o le 25kg/talu
a, Teu i se nofoaga malūlū, mago ma lelei mo le ea
b, Mamao ese mai le afi ma le vevela
c, Taulima ma le fa'aeteete ma ia aua ne'i gau
