I-TMAH 25% Tetramethylammonium Hydroxide cas 75-59-2 yodidi lwezemizi-mveliso/lwe-elektroniki
I-TMAH 25% Tetramethylammonium Hydroxide cas 75-59-2
Iinkcukacha zemveliso:
Igama leMveliso: TMAH 25%; Tetramethylammonium Hydroxide
Inombolo ye-CAS: 75-59-2
Ifomula yeMolekyuli: C4H13NO
Inkangeleko: ulwelo olungenambala
Yantlandlolo njengekristale engenambala (equlethe amanzi amathathu/amahlanu ekristale), kulula ukufunxa umswakama, inevumba elithile le-ammonia kunye nesiseko esinamandla; ifunxa ikharbon diokside emoyeni, yenza i-carbonate, i-organic alkali, kunye nokubola okunamandla. Le mveliso ineentlobo ezimbini zeenkcukacha: isisombululo samanzi kunye nesisombululo se-methanol.
I-Tetramethylammonium hydroxide (TMAH okanye i-TMAOH) yityuwa ye-quaternary ammonium enefomula yemolekyuli [(CH3)4N]+[OH]-, kwaye yeyona ilula kwiklasi yeekhompawundi ze-organic quaternary ammonium. Enye yeendlela ezisetyenziswa ngayo kwimizi-mveliso kukusika i-silicon nge-anisotropic. Ikwasetyenziswa njengesinyibilikisi esisisiseko ekuphuhlisweni kwe-acidic photoresist kwinkqubo ye-photolithography. Ekubeni iyi-phase transfer catalyst, isebenza kakhulu ekususeni i-photoresist. Ikwasetyenziswa njenge-surfactant ekuhlanganiseni i-ferrofluid, ukuthintela ukuhlangana.
1) Kwicala lohlalutyo, i-tetramethylammonium Hydroxide ingasetyenziswa njenge-reagent ye-polarographic.
2) Ngokuphathelele ukucocwa kwemveliso, yayisetyenziswa njenge-alkali engenalo uthuthu ukuze ichithe into ethile yesinyithi.
3) kwishishini le-elektroniki, ingakumbi njengomphuhlisi we-resister olungileyo, i-silicon wafer etchant emanzi kunye nesisombululo esicocekileyo kakhulu senkqubo ye-CMP.
4) ekwenzeni iisekethe ezidityanisiweyo, izibonisi zekristale yolwelo, iibhodi zesekethe eziprintiweyo, ii-capacitors, ii-sensors, kunye nezinye izinto ezininzi ze-elektroniki.
| Ulwazi lokuThunyelwa | Izikhongozeli |
| Idrama ecocekileyo engama-200L | |
| Ezinye izikhongozeli ziyafumaneka xa ziceliwe. | |
| Uhlu loThutho | |
| Igama elifanelekileyo lokuthunyelwa: i-tetramethylammonium hydroxide | |
| Udidi lweengozi: 8 | |
| Inombolo yesazisi: UN1835, PGII |
| Ukhuseleko kunye noLawulo | Ukuze ufumane ulwazi oluthile lokhuseleko kunye nokuphathwa nceda ujonge kwi |
| Iphepha leDatha yoKhuseleko lwezinto ezisetyenzisiweyo elifumaneka xa liceliwe. |
| Into | Isalathiso |
| Inkangeleko | Ulwelo olungenambala |
| Uvavanyo | 25.00±0.50% |
| UHazen | ≤ 50# |
| (CO32-) | ≤ 40ppm |
| (Cl) | ≤ 0.1ppm |
| (CH3OH) | ≤ 40ppm |
| (Oko) | ≤ 5ppb |
| (Oko) | ≤ 10ppb |
| (Mg) | ≤ 5ppb |
| (Al) | ≤ 10ppb |
| (K) | ≤ 10ppb |
| (Oko) | ≤ 10ppb |
| (Cr) | ≤ 5ppb |
| (Mn) | ≤ 5ppb |
| (Fe) | ≤ 5ppb |
| (I-Co) | ≤ 5ppb |
| (Ngaphakathi) | ≤ 5ppb |
| (Nge) | ≤ 5ppb |
| (Zn) | ≤ 5ppb |
| (Ngenxa) | ≤ 5ppb |
| (Kwi) | ≤ 5ppb |
| (ICD) | ≤ 5ppb |
| (Pb) | ≤ 5ppb |
| isuntswana (≥0.5μm) | ≤100ea/ml |
200kg okanye 25kg/idrama
a, Igcinwe kwindawo epholileyo, eyomileyo neyokungenisa umoya
b, Kude nomlilo nobushushu
c, Phatha ngononophelo kwaye ungaphuki














